U.S. Court of Appeals upholds July 2010 decision that various DuPont Air Products NanoMaterials' tungsten Chemical Mechanical Planarization slurries do not infringe Cabot Microelectronics' patents
November 17, 2011
– The United States Court of Appeals for the Federal Circuit has upheld a July 2010 jury decision in the United States District Court for the District of Arizona holding that various DuPont Air Products NanoMaterials, L.L.C. (DA NanoMaterials) tungsten Chemical Mechanical Planarization (CMP) slurries do not infringe Cabot Microelectronic's patents. This latest ruling further validates DA NanoMaterials' decision to defend its novel technology and associated intellectual property in tungsten polishing formulations and applications.
"We are extremely pleased with the ruling affirming non-infringement of Cabot's CMP patents. There is strong demand for a viable alternative tungsten CMP slurry, and we are happy that the path is now clear for DA NanoMaterials to further execute its growth strategy in this important market," said Seng Wui Lim , chief executive officer, DA NanoMaterials. "We believe our tungsten product portfolio is truly differentiated and offers customers significant performance benefits which meet the challenging demands of future technology nodes. We have shown our ability to successfully grow our business in the copper and barrier market through close collaboration with customers and look forward to extending this success into the tungsten segment."
Following the ruling, DA NanoMaterials will further invest in infrastructure to support the market need for alternative tungsten slurry solutions.
About DA NanoMaterials
Established in 2000, DA NanoMaterials L.L.C. is a 50:50 joint venture between DuPont and Air Products. Headquartered in Tempe, Ariz. , with regional headquarters in Hsinchu County Taiwan, the company operates state-of-the-art applications and formulation laboratories in Tempe, Ariz. , and Taiwan . It manufactures products in Asia , Europe and North America to service the global semiconductor and wafer polishing markets. DA NanoMaterials markets its CMP slurries under the CoppeReady®, MicroPlanar®, Syton® and Mazin™ trademarks. Additional information on the company can be obtained from its website - www.nanoslurry.com.
About Air Products
Air Products (NYSE: APD - News) serves customers in industrial, energy, technology and healthcare markets worldwide with a unique portfolio of atmospheric gases, process and specialty gases, performance materials, and equipment and services. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. In fiscal 2011, Air Products had revenues of $10.1 billion , operations in over 40 countries, and 18,900 employees around the globe. For more information, visit www.airproducts.com.
DuPont (NYSE: DD - News) has been bringing world-class science and engineering to the global marketplace in the form of innovative products, materials, and services since 1802. The company believes that by collaborating with customers, governments, NGOs, and thought leaders we can help find solutions to such global challenges as providing enough healthy food for people everywhere, decreasing dependence on fossil fuels, and protecting life and the environment. For additional information about DuPont and its commitment to inclusive innovation, please visit http://www.dupont.com.